Quantum Cascade Laser-Based Measurement of Metal Alkylamide Density During Atomic Layer Deposition

Authors: James E. Maslar, William A. Kimes, Brent A. Sperling

Journal: OSA Vol. 21, No. 10/ DOI: 10.1364/OE.21.011659

Year: 2012

Applications: Sensors, Analyzers & Spectrometers